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→Focused Ion Beam - Secondary Electron Microscope (FIB-SEM)
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[[File:Foto0049.jpg|300px|thumb|right|FIB-SEM]] | [[File:Foto0049.jpg|300px|thumb|right|FIB-SEM]] | ||
This is Carl Zeiss Auriga Compact field effect SEM with an electron acceleration voltage in the range 0.5 to 30 kV and is equipped with three different detectors for secondary and backscattered electrons. The system includes an XFlash Bruker EDS detector for compositional studies. It is possible to perform local point, line scan and mapping analysis. An electron back-scattered diffraction detector (EBSD) has been recently installed for the determination of crystalline phases and orientation with a sample angle of 70º. The microscope is also equipped with an FIB gallium gun providing an acceleration voltage of 1 to 30 keV for cross-section inspection and TEM samples preparation on conductive and insulating materials. | |||
===Secondary Ion Mass Spectrometry (SIMS)=== | ===Secondary Ion Mass Spectrometry (SIMS)=== | ||
[[File:Foto0288.jpg|300px|thumb|right|SIMS]] | [[File:Foto0288.jpg|300px|thumb|right|SIMS]] | ||
SIMS: Hiden Analytical secondary ion mass spectroscopy equipment using oxygen or argon ions as primary ions with an energy of 5 keV. Mass identification (1 to 550 amu), depth profiling and static SIMS capabilities. The system is also useful for compositional mapping and it incorporates an electron gun for SIMS experiments in insulating materials. The electronegative ions can be better detected using a Cs ion gun, with an energy up to 5 keV. | SIMS: Hiden Analytical secondary ion mass spectroscopy equipment using oxygen or argon ions as primary ions with an energy of 5 keV. Mass identification (1 to 550 amu), depth profiling and static SIMS capabilities. The system is also useful for compositional mapping and it incorporates an electron gun for SIMS experiments in insulating materials. The electronegative ions can be better detected using a Cs ion gun, with an energy up to 5 keV. | ||