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===Secondary Ion Mass Spectrometry (SIMS)=== | ===Secondary Ion Mass Spectrometry (SIMS)=== | ||
[[File:Foto0288.jpg|300px|thumb|right|SIMS]] | [[File:Foto0288.jpg|300px|thumb|right|SIMS]] | ||
This Hiden Analytical secondary ion mass spectroscopy system uses oxygen or argon ions, with an energy of 5 keV, as the primary ions. Mass identification (1 to 550 amu), depth profiling and static SIMS capabilities are available. The system is also used for compositional mapping and it incorporates an electron gun for SIMS experiments in insulating materials. Electro-negative ions can be better detected using a Cs ion gun with an energy up to 5 keV. |
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