LNF:Technology: Difference between revisions

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===60 keV DANFYSIK ION IMPLANTER===
===60 keV DANFYSIK ION IMPLANTER===


[[File:Foto0045.jpg|500px|thumb|right|Ion Implanter]]
[[File:Foto0045.jpg|500px|thumb|right|60 keV ion implanter beam line at CIEMAT]]




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*Beam energy: up to 60 keV.  
*Beam energy: up to 60 keV.  
*Beam current: up to 150 µA depending on ion.
*Beam current: up to 150 µA depending on ion.
*Sample size: from ≈ 3 mm2 to about 4x2 cm2
*Sample size: from ≈ 3 mm<sup>2</sup> to about 4x2 cm<sup>2</sup>
*Unfocused beam diameter at target: ≈ 1 cm
*Unfocused beam diameter at target: ≈ 1 cm


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